frequency drift – TechConnect Briefs

Analysis of Temperature Effect on Diaphragm Resonant Sensors

Faris W., Virginia Polytechnic and State Univeristy, US

Resonant senosrs and microsensors are one of the most common used sensors in industry. The applications ranges from fuid, pressure to chemical sensing. Temperature effect on the performance of such devices is of importance to [...]

Thermal Frequency Drift of Resonant Microsensor

Shen F., Lu P., O'Shea S.J., Lee K.H., Pradhan S.C., Ng T.Y., Institute for High Performance Computing, SG

Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along [...]