equivalent model – TechConnect Briefs

Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

Rochus V., Farghaly M., Rottenberg X., Tilmans H.A.C., IMEC, BE

This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port [...]