electrostatic – Page 3 – TechConnect Briefs

Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures

Kuhn J.L., Dutta S.B., Greenhouse M.A., Mott D.B., NASA/Goddard Space Flight Center, US

Closed form and finite element models are developed to predict the device response of aluminum electrostatic torsion micro-mirrors fabricated on silicon substrate for space applications at operating temperatures of 30K. Initially, closed form expressions for [...]

Micromirror Array Design and Simulation

Huja M., Husak M., Czech Technical University in Prague, CS

The main objective of the research described is to design optimal principle of micromirror array and its manufacturing technology with maximum penentration of the reflected/non-reflected part of micromirror array using standard, easily available and cheap [...]

Analysis of an Electrostatic Microactuator with the Help of Matlab/Simulink: Transient and Frequency Characteristics

, ELMI, FR

The article is focused on the development of a numeric simulator dedicated to the electrostatic microactuator. It's based on the use of Simulink (Matlab „). The electrostatic microactuator is regard as a model <> associated [...]

Torsional Ratcheting Actuating System

Barnes S.M., Miller S.L., Rodgers M.S., Bitsie F., Sandia National Laboratories, US

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external [...]

Analytical Modeling of Beam Behavior Under Different Actuations

Sarraute E., Dufour I., URA CNRS 1375, FR

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the [...]

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Allen J.J., Miller S.L., LaVigne G.F., Rodgers M.S., Eaton W.P., Sandia National Laboratories, US

The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]