electrostatic actuators – TechConnect Briefs

Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

Sarajlic E., Berenschot E., Krijnen G., Elwenspoek M., University of TWente, NL

An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (

Compact Modeling of Bistable Electrostatic Actuators

Xu J., Darling R.B., Lauritzen P.O., University of Washington, US

A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a [...]