DRIE – TechConnect Briefs

A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope

Sharaf A., Sedky S., Serry M., Elshurafa A., Ashour M., Habib S.E.-D., American University in Cairo, EG

Gyroscopes are sensors that measure rotation rate and are extremely important in many applications such as navigation and vehicle stability control. Despite being manufactured in many technologies in various shapes and sizes, micro-electromechanical (MEMS) gyroscopes [...]

Design and implementation of silicon-based optical nanostructures for integrated photonic circuit applications using Deep Reactive Ion Etching (DRIE) technique

Selvarasah S., Banyal R., Casse B.D.F., Lu W.T., Sridhar S., Dokmeci M.R., Northeastern University, US

Photonic crystals (PhC) are artificially engineered periodic structures capable of manipulating and shaping optical signals. Nanoscale photonic crystals is expected to add new functionalities to the next generation of optical integrated circuits by providing novel [...]

Global MEMS Equipment and Materials Markets and Opportunities

Sheet L., SEMI, US

The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. [...]

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers

Cooper A.W., Docker P.T., Ward M.C., The University of Birmingham, UK

This paper describes a novel technique for manufacturing optical gratings by using the one step DRIE (Deep Reactive Ion Etching) process. Using the notching effect documented in previous work when working with silicon on insulator [...]

A Novel Method for Determining Optimum Etch Times for the One Step Dry Release Proces

Docker P.T., Kinnell P.K., Ward M.C., The University of Birmingham, UK

This paper details a novel method for determining the optimum etch times for releasing structures when using the authors one step dry release process. By using self releasing structures known as waffles the exact point [...]