Capacitance Extraction from Complex 3D Interconnect Structures
Cartwright D., Csanak G., George D., Walker R., Kuprat A., Dengi A., Grobman W., Los Alamos National Laboratory, US
A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive [...]