C-MEMS – TechConnect Briefs

Fabrication of 3D carbon microelectrodes for Li-Ion battery applications

Turon Teixidor G., Wang C., Madou M.J., University of California Irvine, US

The fabrication of very high-aspect ratio 3D carbon microelectrodes for Li-Ion batteries is presented. Using a pyrolysis process under inert conditions, thick layers of patterned SU-8 photoresist (up to 700 ?m in height) are converted [...]

Carbon Microstructures for Glucose Biosensor

Xu H., Malladi K., Wang C., Madou M.J., University of California Irvine, US

In this work we report on a novel design and fabrication of glucose sensor based on carbon post electrode array. Apart from the fact that carbon has a wide electrochemical stability window, one advantage of [...]

Microfabrication and Mechanical Characterization of Suspended Carbon Microstructures

Malladi K., Wang C., Madou M.J., Xue W., Cui T., University of California Irvine, US

The idea of suspended carbon micro/nanostructures has been researched by a few research groups ], however, controlled fabrication of suspended carbon micro/nano structures in desired positions and with the desired shape and dimension is still [...]

Fabrication of Suspended C-NEMS Structures by EB Writer and Pyrolysis Method

Malladi K., Wang C., Madou M., University of California Irvine, US

Recently suspended C-MEMS structures were fabricated by accurately controlling the processing parameter. However how to fabricate various suspended C-NEMS structures is still a big challenge. Here we successfully fabricated C-NEMS by UV/EB lithography and pyrolysis [...]