bulk acoustic resonator – TechConnect Briefs

Low Motional Impedance Bulk Acoustic Resonators Based on Metamaterials

Rottenberg X., Jansen R., Rochus V., Figeys B., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the implementation of propagating acoustic metamaterials in electrostatically transduced Bulk Acoustic Resonators (BARs) to tune by design their characteristic properties. Novel in this paper is our focus on lowering the observed motional [...]

High Sensitivity Dielectric Filled Lamé Mode Resonator for Chemical and Biological Applications

Heidari A., Yoon YJ., Park WT., Lin J.T.M., Nanyang Technological University, SG

In recent years the use of micro and nano electromechanical (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. In many applications, high sensitivity biomass sensors are required to sense small biological entities (e.g. [...]