Development of A Novel Electrostatic Precipitator Using Carbon fiber Unipolar Ionizers and Dielectric Collection Plates and Its Removal of Ultrafine Particles
Kim H.-J., Kim Y.J., Han B., Oh W.S., Oda T., Kim H.-J., Kim Y.J., Korea Institute of Machinery and Materials, KR
Current electrostatic precipitators (ESPs) for removing particles from semiconductor industries have used costly anti-corrosive metallic materials to maintain the particle removal performance. Due to the economical demand of the industries, a novel ESP has been [...]