Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater
Kim Y.D., Jung B.B., Lee H.K., Lee K.H., Lee H.K., Lee K.H., Park H.C., Pohang University of Science and Technology, KR
AAO(Anodic Aluminum Oxide) film is fabricated as a sensing material of capacitive humidity sensors. Because AAO films have a lot of nano-size pores, many water vapors can be absorbed. The size of a pore diameter [...]