Angular Spectrum – TechConnect Briefs

System-Level Optical Interface Modeling for Microsystems

Kurzweg T.P., Sharma A.S, Bhat S.K., Levitan S.P., Chiarulli D.M., Drexel University, US

In this paper, we present an accurate and computationally efficient system-level optical propagation technique suitable for the modeling of optical interfaces. Our technique is based on extensions to the angular spectrum technique used to solve [...]

An Efficient Optical Propagation Technique for Optical MEM Simulation

Kurzweg T.P., Levitan S.P., Martinez J.A., Kahrs M., Chiarulli D.M., University of Pittsburgh, US

As designers become more aggressive in introducing optical components into micro-systems, additional capabilities are required for modeling and simulation tools. Common optical modeling techniques are not applicable for most optical micro-systems, and techniques that are [...]

Modeling Image Formation in Layered Structures: Application to X-ray Lithography

Bollepalli S.B., Khan M., Cerrina F., UW-Madison, US

In the fabrication of semiconductor devices using lithography, the modeling of the exposure process is very often needed. The elements of a typical exposure system from a modeling perspective comprise of a radiation source, a [...]