accelerometer – Page 3 – TechConnect Briefs

Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems

Lien H-P, Wiegele T.G., Bomholt L., Ruhl R., Integrated Systems Engineering AG, CH

Micro-electro-mechanical systems equipped with active devices (iMEMS) are commonly employed in sensor applications. In this paper, simulation of the mechanical and electrical properties of a deformable structure containing an integrated MOS sensor is described.

System Level Simulation of a Digital Accelerometer

Kraft M., Lewis C.P., Coventry University, UK

This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics [...]