Zorman C.A. – TechConnect Briefs

MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

Enderling S., Jiang L., Ross A.W.S., Bond S., Hedley J., Harris A.J., Burdess J.S., Cheung R., Zorman C.A., Mehregany M., Walton A.J., University of Edinburgh, UK

This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a [...]

Finite-Element Modeling of 3C-SiC Membranes

DeAnna R.G., Mitchell J., Zorman C.A., Mehregany M., U.S. Army Research Laboratory, US

Finite-element modeling (FEM) of 3C-SiC thin-film membranes on Si substrates was used to determine the residual stress and center deflection with applied pressure. The anisotropic, three-dimensional model includes the entire 3C-SiC membrane and Si substrate [...]

Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range

DeAnna R.G., Roy S., Zorman C.A., Mehregany M., US Army Research Laboratory, US

Finite-element analysis (FEA) modal results of 3C-SiC lateral resonant devices anchored to a Si substrate are presented as resonant frequency versus temperature. The suspended elements are etched from a 2 mm, 3C-SiC film grown at [...]