Boron Diffusion and Activation in Silicon in the Presence of Other Species
Li H-J., Kohli P., Ganguly S., Kirichenko T.A., Zeitzoff P., Torres K., Banerjee S., Univ. of Texas Austin, US
Modeling and experimental investigation of B equilibrium diffusivity and its activation in Si in the presence of other species, including ab initio calculations, are presented here. The results suggest that incorporating other species along with [...]