Voigt P. – TechConnect Briefs

Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme

Schrag G., Voigt P., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also [...]

Compact MEMS Modeling for Design Studies

Voigt P., Wachutka G., University of Technology, DE

A method for MEMS macromodel development is presented which is based on a physical device description to obrain mathematical relations for the device operation. Since design and technlogy parameters are input parameters of the resulting [...]

Modeling Strategies for Microsystems

Voigt P., Schrag G., König E-R, Wachutka G., Technical University of Münich, DE

A hierarchical approach to microsystem modeling is outlined. On the device level, the operating behavior is analyzed on the basis of continuous field models To deal with the coupling effects typical of microsystems, various coupling [...]