Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale – the Followup
Veryovkin I.V., Baryshev S.V., Zinovev A.V., Tripa C.E., Peng Q., Elam J.W., Pellin M.J., Argonne National Laboratory, US
Depth resolution on the order of a few atomic layers has been demonstrated by initial tests of the dual beam sputter depth profiling with the SARISA laser post-ionization secondary neutral mass spectrometry instrument, which was [...]