Triltsch U. – TechConnect Briefs

Design for Manufacturing integrated with EDA Tools

Triltsch U., Büttgenbach S., Technical University of Braunschweig, DE

In this paper we present a process planning and optimization tool which can be linked to commercially available EDA tools. The increasing variety of available fabrication technologies and materials for microtechnological devices make the design [...]

Optimization of Masks for High Aspect Ration UV-Lithographic Patterning

Triltsch U., Büttgenbach S., Technische Universität Braunschweig, DE

The increasing complexity of micro actuators and micro sensors (e.g. electroplated micro coils, flux guidances, insulation and planarization layers) make new fabrication technologies and materials inevitable. For such purposes thick-film photo resists like SU-8 or [...]

FE-Simulations as a Part of a Tolerance Management System

Straube D., Germer C., Franke H-J, Triltsch U., Büttgenbach S., Technical University Braunschweig, DE

This paper reports on a software tool, which enabled tolerance management based on FE-Simulations and want to deliver impressions of the benefits of this coupling. The term tolerance management unites analysis, i.e. investigation of effects [...]

T-CAD Environment for Multi-Material-MEMS Design

Triltsch U., Büttgenbach S., Straube D., Franke H-J, Technical University of Braunschweig, DE

The presented approach delivers a design tool for multi-material MEMS and can act as a system level tool with interfaces for component level analysis tools. The platform provides interfaces to different knowledge bases which either [...]

Analysis and Verification of Processing Sequences

Hansen U., Triltsch U., Büttgenbach S., Germer C., Franke H-J, Institute for Microtechnology, Braunschweig, DE

In the field of micro technology new technologies are being developed and employed to generate increasingly complex microsystems. Due to this, engineers have to be acquainted with considerable knowledge about the different processing technologies in [...]