A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
Zaman M.H., Bart S.F., Rabinovich V.L., Ghaddar C.K., Tchertkov I., Gilbert J.R., Microcosm Technologies, Inc., US
This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of [...]