Simulation of Gas Flows in Micro Devices by Solving the Boltzmann Kinetic Equation
Anikin Yu.A., Dodulad O.I., Kloss Yu.Yu., Martynov D.V., Tcheremissine F.G., Shuvalov P.V., Moscow Institute of Physics and Technology, National research centre “Kurchatov institute”, RU
Numerical modeling of gas flows in micro devices has practical value due to the high application opportunities of such devices to the relevant industries. Gas behavior is accurately described by the Boltzmann equation of the [...]