Sung J.C-M – TechConnect Briefs

Diamond Growth on an Array of Seeds: The Revolution of Diamond Production

Sung J.C-M, Tai M-F, Kinik Company, TW

Industrial diamond production was pioneered by General Electric Company of U. S. in 1957 and followed by De Beers of S. Africa in 1961. The two companies optimized the production of diamond grits by heating [...]

Direct Wafer Polishing with 5 nm Diamond

Sung J.C-M, Tai M-F, Kinik Company, TW

CMP for making future semiconductor chips with nanom (nano meter) feature sizes can be accomplished by using nanom diamond particles embedded in an organic matrix (e.g. epoxy). Such nanom diamond particles are derived from the [...]

Wurtzitic Boron Nitride on Diamond: The Ultimate Epitaxial Wafer for “Semiconductor on Insulator”

Sung J.C-M, Kinik Company, TW

In last four decades, the miniaturization of semiconductors devices (e.g. integrated circuitry) has been following Moore’s Law with feature (e.g. transistors) density double in about every 18 months. This relentless geometrical progression would require the [...]

Cermet Ceramic Coating on Diamond Dresser for In-Situ Dressing of Chemical Mechanical Planarization

Sung J.C-M, Kan K., Kinik Company, TW

In recent years, copper circuitry has been replacing aluminum wires and tungsten via as the dominant interconnections. The polishing of copper circuitry requires using highly acidic solution (e.g. pH = 4) and with strong oxidizing [...]

Amorphous Diamond Electron Emission for Thermal Generation of Electricity

Sung E., Sung J.C-M, Sung M., Kan K., Sung E., Sung J.C-M, Sung M., Huang J-L, Sung E., Sung J.C-M, Sung M., Chen C-P, Hsu K-H, Tai M-F, Kinik Company, TW

Amorphous diamond represents a class of material of its own. It may be viewed to be a composite of metal (graphite) and insulator (diamond), but together they form a unique passage for electrons to flow [...]