Modeling and Simulation of New Structures for Sub-millimeter Solid-state Accelerometers with Piezoresistive Sensing Elements
This paper presents design, fabrication and characterization of miniaturized one-axis single crystal solid-state accelerometers with Nanometer Stress Concentration Region (NSCR) on piezoresistive sensing elements utilizing MEMS bulk micromachining techniques and design, simulation of new sub-millimeter [...]