Stiller P. – TechConnect Briefs

Numerical Simulations to Predict the Functionality of Optical Devices

Scherer K.P., Eggert H., Guth H., Sieber I., Stiller P., Forschungszentrum Karlsruhe, DE

At the Institute of Microstructures in the Research Center of Karlsruhe (FZK) optical devices are developed in micro-structure technologies [1]. Because of the miniaturized dimensions of the optical components, a very high accuracy must be [...]