Wafer Scale Aligned Sub-25nm Metal Nanowires on Silicon (110) using PEDAL Lift-off Process
Sonkusale S.R., Amsinck C.J., Nackashi D.P., Di Spigna N.H., Barlage D., Johnson M., Franzon P.D., North Carolina State University, US
We have demonstrated a new PEDAL process to make sub-25 nm nanowires across the whole wafer. The PEDAL process is useful in the fabrication of metal nanowires directly onto the wafer by doing shadow metalization [...]