Shixin C. – TechConnect Briefs

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Jianqiang M., Shixin C., Yi L., Boon Buan L., Data Storage Institute, SG

Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Jianqiang M., Shixin C., Yi L., Data Storage Institute, SG

The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from [...]