Simulation of the Production of Functional Layers for Vibration Sensors for Tool State Monitoring and Finite Element Analysis of Mechanical Characteristics
Thomas J., Kühnhold R., Schnupp R., Temmel G., Ryssel H., Fraunhofer-Institut fur Integrierte Schaltungen, DE
A novel MEMS vibration sensor for high acceleration am-plitudes was developed in silicon technology for tool state monitoring. According to the application-specific require-ments, the piezoresistive detection of vibration with polysilicon piezoresistors deposited on a thin [...]