Phenomenological Model for Gas Damping of High-Speed Switches
Greywall D.S., Walker J.A., Busch P.A, Arney S.C., Bishop D.J., Boyd G.D., Frigo N.J., Goossen K.W., Iannone P.P., Ruel R.R., Yurke B., Bell Laboratories, Lucent Technologies, Inc., US
This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic [...]