Rixen D.J. – TechConnect Briefs

Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever beams. Multi-physics simulations of micro-electro-mechanical [...]

Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid [...]