Putnam C. – TechConnect Briefs

An Efficient and Accurate Schematic Transistor Model of FinFET Parasitic Elements

Lu N., Hook T.B., Johnson J.B., Wermer C., Putnam C., Wachnik R.A., IBM, US

We present a schematic transistor model for multi-finger multi-fin FETs, which reduces an initial complex finFET network to a very simple finFET network. The schematic finFET model is accurate in predicting overall finFET characteristics, including [...]

Characterization and Modeling of Metal Finger Capacitors

Lu N., Booth R., Daley D., Thompson E., Putnam C., IBM, US

A capacitor solution with no mask or process additions can be formed by the use of interdigitated metal fingers. Often, this metal finger capacitor uses multiple back-end-of-line (BEOL) levels to increase capacitance density. Metal structures [...]