CAD for Opto-Electronic Microsystems
Kurzweg T.P., Levitan S.P., Marchand P.J., Prough K.R., Chiarulli D.M., University of Pittsburgh, US
The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended [...]