Thermal Frequency Drift of Resonant Microsensor
Shen F., Lu P., O'Shea S.J., Lee K.H., Pradhan S.C., Ng T.Y., Institute for High Performance Computing, SG
Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along [...]