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HomeAuthorsMukherjee T.

Authors: Mukherjee T.

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US
MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Modeling of Joule Heating in Electrophoretic Separation Microchips

Wang Y., Lin Q., Hoburg J.F., Mukherjee T., Carnegie Mellon University, US
This paper presents a model for Joule heating induced analyte dispersion in electrophoretic separation channels with a rectangular cross section. The model is in closed form and captures the effect of cross-sectional geometry. Three-dimensional numerical [...]

Convergence and Speed Issues in Analog HDL Model Formulation for MEMS

Iyer S., Jing Q., Fedder G.K., Mukherjee T., ECE Department, Carnegie Mellon University, US
Behavioral simulation using high-level hardware description languages (HDLs) is becoming increasingly relevant for mixed-domain MEMS simulation. In this paper three issues which impact the convergence and simulation time in MEMS behavioral simulations are addressed. First, [...]

Layout Verification and Correction of CMOS-MEMS Layouts

Baidya B., He K., Mukherjee T., Carnegie Mellon, US
The advent of CMOS micromachining has introduced new design rules for fabrication of integrated CMOS-MEMS devices. This paper presents a context dependent DRC algorithm to handle the issues related to pre-fabrication verification of such layouts. [...]

Challenges in CMOS-MEMS Extraction

Baidya B., Mukherjee T., Carnegie Mellon University, US
CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]

Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams

Iyer S., Lakdawala H., Fedder G.K., Mukherjee T., Carnegie Mellon University, US
Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US
An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]

Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs

Iyer S., Zhou Y., Mukherjee T., Carnegie Mellon University, US
Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range [...]

Intelligent Automatic Meshing of Multilayer CMOS Micromachined Structures for Finite Element Analysis

Lakdawala H., Baidya B., Mukherjee T., Fedder G.K., Carnegie Mellon University, US
In this paper, we describe an automatic technique for meshing multilayer CMOS micromachined structure for Finite Element Analysis (FEA) from device layout. The technique is based on a 3D canonical representation of the different CMOS [...]

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