Miller S.L. – TechConnect Briefs

Torsional Ratcheting Actuating System

Barnes S.M., Miller S.L., Rodgers M.S., Bitsie F., Sandia National Laboratories, US

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external [...]

IMAP: Interferometry for Material Property Measurement in MEMS

Jensen B.D., de Boer M.P., Miller S.L., Sandia National Laboratory, US

An interferometric technique has been developed for non-destructive, high-confidence, in-si tu determination of material properties in MEMS. By using interferometry to measure the full deflection curves of beams pulled toward the substrate under electrostatic loads, [...]

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Allen J.J., Miller S.L., LaVigne G.F., Rodgers M.S., Eaton W.P., Sandia National Laboratories, US

The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]