Step and Repeat UV Imprint Process Technology for Wafer-Scale Nano-Manufacturing
Watts M., Truskett V., Choi J., Mackay C., McMackin I., Schumaker N., Schumaker P., Babbs D., Sreenivasan S.V., Schumaker N., Schumaker P., Molecular Imprints, Inc, US
The Step and Flash Imprint Lithography (S-FILTM) process is a step and repeat nano-replication technique based on UV curable low viscosity liquids. S-FIL uses field-to-field drop dispensing of the UV curable liquids for the step [...]