The Fabrication and Multi-Physics Simulation of a Novel Low Power Electrothermal Bimorph Actuator
A novel electrothermal bimorph actuator was designed for low-power (below 300mW), quick-response (below 10ms) switching application. The research work was supported by the Funds for National Key Laboratory (9140C3605101006). Three aspects about the electrothermal bimorph [...]