Liao H-S – TechConnect Briefs

Compact MEMS/NEMS Characterization Platform Using a DVD Optical Pick-up Unit with Optical Imaging Function

Chen C-H, Larsen T., Schmid S., Liao H-S, Hwang I-S, Boisen A., Hwu E-T, Academia Sinica, TW

We present a compact, simple and efficient platform for MEMS/NEMS characterization. In this platform, a DVD optical pickup unit (OPU) is combined with a CCD camera. A nano-scale resolution long range X-Y-Z linear stage below [...]