Lee W.I. – TechConnect Briefs

A study of the Demolding Force in Nano Imprint Lithography For Different Surface Treatments

Moon S.N., Jung J-M, Lee K.M., Lee W.I., Lee K.M., Lee W.I., Seoul National University, KR

The NIL process can be divided into two steps: the pressing and demolding stages. In the pressing stage, micro/nano scale patterns on a mold are transferred to a polymer resist. During this stage, there are [...]

Analysis of the Liquid Mediated Friction during Alignment in NIL Process

Kang S-H, Park S.H., Lee W.I., Seoul National University, KR

When Nano-Imprint Lithography (NIL) process is adopted in the large area applications like display, the stiction phenomenon which is the adhesion or in-plane friction between mold and substrate to disturb fine alignment process can be [...]

Analysis of density variation for different temperatures in thermal nano imprinting process

Lee D.E., Lee H.J., Lee W.I., Lee D.E., Lee H.J., Lee W.I., Choi S-W, Lee D.E., Lee H.J., Lee W.I., Seoul National University, KR

Density variation of the polymer resist for different temperatures in thermal nano imprinting1 process was studied by both experiments and molecular dynamics (MD) simulations. After patterning, we estimated the local density by measuring the pull-off [...]

Numerical Simulation of NIL Process Based on Continuum hypothesis

Kim S.M., Woo Y.S., Lee D.E., Lee W.I., Lee D.E., Lee W.I., Seoul Nat'l Univ., KR

Nano imprint lithography(NIL) is a cost-efficient, high-throughput processing technique to transfer nano-scale patterns onto thin polymer films. Polymers used as the resist include UV cured resins as well as thermoplastics such as polymethyl-methacrylate(PMMA). In this [...]

Numerical Analysis of Nano-imprinting Process Based on Continuum Hypothesis

Kim B.S., Kim H-C, Woo Y.S., Lee W.I., Oh S.I., Kim B.S., Kim H-C, School of Mechanical and Aerospace Engineering, Seoul National University., KR

Nano-imprint lithography (NIL) is a processing tech-nique capable of transferring nano-scale patterns onto a thin film of thermoplastics such as polymethyl methacrylate (PMMA). Feature sizes down to 10 nm have been demonstrated to be made [...]