Lalinsky T. – TechConnect Briefs

MEMS pressure sensor with an AlGaN/GaN based high electron mobility transistor

Vanko G., Dzuba J., Rýger I., Vallo M., Institute of Electrical Engineering, SK

The III Nitrides (III-N), especially gallium nitride (GaN) and its compounds, are very attractive for pressure and strain sensing thanks to their excellent piezoelectric properties. The AlGaN/GaN heterostructure offers high mechanical and chemical stability, operation [...]

Micromechanical GaAs Thermal Convertor for Gas Sensors

Jakovenko J., Lalinsky T., Drzík M., Vanko G., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ

This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. [...]

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ

In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The [...]

Optimization of GaAs MEMS structures for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, CZ

This work discusses the thermo mechanical simulations performed with the aim to optimise the temperature distribution of the Microwave Power Sensor (MPS) microsystem keeping the thermal stress as low as possible. The concept of the [...]

Design and Simulation of the GaAs Micromechanical Thermal Converter for Microwave Transmitted Power Sensor

Jakovenko J., Husak M., Burian E., Lalinsky T., Czech Technical University, CZ

In this project we discuss the thermomechanical simulations performed in the aim of optimising the GaAs based Micromechanical Thermal Converter that creates heart of Microwave Transmitted power sensor. Conception of the absorbed power measurement is [...]