Judaschke R. – TechConnect Briefs

Micro-Fabricated Electrostatic Voltage Sensor with a Thin Bulk-Silicon Device Layer

Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

Micro-fabricated sensors made of a 20 µm thick bulk-silicon device layer for electrostatic voltage measurements are presented. A rotational, seesaw-like actuator with two electrically isolated electrodes on its ends forming parallel-plate capacitors with opposing electrodes [...]

Modeling and Design of Electrostatic Voltage Sensors Based on Micromachined Torsional Actuators

Dittmer A., Dittmer J., Dittmer A., Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

The optimization of design parameters and methods for electrostatic voltage sensors based on torsional actuators is presented. The analytical software model used for this optimization process is discussed and compared to measurement results. Voltage excitation [...]