Jen C-P – TechConnect Briefs

Numerical Investigation of Phase-Changing Heat Transfer for Laser-Assisted Direct Nano Imprint Processing

Hsiao F-B, Wang D-B, Jen C-P, Lee Y-C, Chuang C-H, National Cheng Kung University, TW

Laser-Assisted Direct Imprinting (LADI), a novel and promising technique, has been proposed since 2002 to utilize an excimer laser to irradiate and heat the silicon surface through a highly-transparent quartz mold preloaded onto the silicon. [...]