Electromechanical Analysis of Micromechanical SOI-Fabricated RF Resonators
Lamminmäki T., Ruokonen K., Tittonen I., Mattila T., Jaakkola O., Oja A., Seppä H., Seppälä P., Seppälä P., Kiihamäki J., Helsinki University of Technology, FI
In this paper, finite element method (FEM) simulations are used to model mechanical properties of MEMS resonators. Using a static displacement analysis the effective spring constant and mass are calculated. Non-linearity of the mechanical restoring [...]