Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation
The reliable estimation of squeeze-film damping (SQFD) is a prerequisite for the design of many microelectromechanical systems (MEMS). The proper operation of several MEMS devices (e.g. accelerometers) often depends crucially on the damping forces, i.e. [...]