Development of a metrological scanning probe microscope as a primary standard for nanoscale dimensional measurement
Babic B., Freund C., Gray M.B., Herrmann J., Hsu M.T.L., Lawn M., McRae T.G., National Measurement Institute Australia, AU
The capability for accurate dimensional measurement at the nanoscale, traceable to the SI meter, is fundamental for the development and effective support of nanoscience and nanotechnology. At the National Measurement Institute Australia (NMIA), the primary [...]