Howe R.T. – TechConnect Briefs

Contact Properties of Titanium Nitride Sidewall Coating for Nanoelectromechanical Electronics

Shavezipur M., Harrison K.L., Lee W-S., Espinosa B., Provine J., Mitra S., Wong H.S.P., Howe R.T., The Ohio State University, US

The performance of hybrid NEM-CMOS low power electronics and logic gates highly depends on the source-drain contact resistance and adhesion force, which affect the power consumption and the pull-in/pull-out hysteresis, respectively. In the present work, [...]

Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes

Phani A.S., Seshia A.A., Palaniapan M., Howe R.T., Yasaitis J., University of Cambridge, UK

Analytical models are presented to describe the resonant modal coupling behaviour of z-axis micromechanical vibratory rate gyroscopes fabricated in an integrated polysilicon surface micromachining process. The models are then applied to predict the extent of [...]

Micromechanical Pierce Oscillator for Resonant Sensing Applications

Seshia A.A., Low W., Bhave S.A., Howe R.T., Montague S., University of California, US

We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal [...]

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

Shkel A., Howe R.T., Horowitz R., University of California-Berkeley, US

This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion [...]