Femtosecond laser micromachining of IC for semiconductor defect analysis
Halbwax M., Sarnet T., Hermann J., Delaporte Ph., Sentis M., Fares L., Haller G., LP3 UMR CNRS 6182, FR
The detection and analysis of defects in Integrated Circuits (IC) are major challenges faced by the semiconductor industry as outlined by the roadmap in the latest International Technology Roadmap for Semiconductors (ITRS). Advanced tools used [...]