Tuning of a MEMS RF Filter
Hammad B.K., Abdel-Rahman E.M., Nayfeh A.H., Virginia Polytechnic Institute and State University, US
We present an analytical model and use it to find closed-form expressions describing the response of a tunable MEMS RF filter. The filter is made of two identical clamped-clamped micro-beams suspended over input and output [...]