Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electric Lines in Microsystems: Modeling Compared to Experiment
Gruhn H., Heidinger R., Rohde M., Rüdinger S., Schneider J., Zum Gahr K.-H., Forschungszentrum Karlsruhe, DE
Laser induced surface modification has been used to fabricate conducting paths in ceramic substrates. For the purpose of process simulation and prediction of process parameters a finite element model has been developed to simulate the [...]