High Resolution Backside Imaging and Thermography using a Numerical Aperature Increasing Lens
Ünlü M.S., Ippolito S.B., Eraslan M.G., Thorne S.A., Vamivakas A., Goldberg B.B., Leblebici Y., Boston University, US
Nanoscale imaging of defects in ICs is a great current technological challenge as IC feature sizes continue to shrink. We have developed novel techniques based on a Numerical Aperture Increasing Lens (NAIL) to study semiconductors [...]