Gilmer G.H. – TechConnect Briefs

Templated virus deposition: from molecular-scale force measurements to kinetic Monte Carlo simulations

Elhadj S., Gilmer G.H., Friddle R.W., Estrada M., Manchester M.E., Johnson J.E., De Yoreo J.J., Noy A., Lawrence Livermore National Laboratory, US

The use of macromolecular scaffolds for hierarchical organization of molecules and materials is a common strategy in living systems that leads to emergent behavior. One characteristic of this strategy is that it generates micron-scale structures [...]

Monte Carlo Modeling of Thin Film Deposition: Influence of Grain Boundaries on the Porosity of Barrier Layer Films

Dalla Torre J., Gilmer G.H., Windt D.L., Baumann F.H., Huang H., Díaz de la Rubia T., Djafari-Rouhani M., Bell Labs, Lucent Technologies, US

We present Monte Carlo simulations of metallic thin films grown by sputter deposition from an infinite target. The Monte Carlo model includes ballistic deposition from the target, surface diffusion, and polycrystalline film growth. We study [...]

Numerical Simulations of Sputter Deposition and Etching in Trenches Using the Level Set Technique

O'Sullivan P.L., Baumann F.H., Gilmer G.H., Bell Laboratories, Lucent Technologies, US

We have performed 2D and quasi-3D numerical simulations of physical vapor deposition (PVD) into high aspect ratio trenches used for modern VLSI interconnects. The topographic evolution is modeled using (continuum) level set methods. The level [...]