Application of focused ion beam technology for photonic nanostructures
Ay F., Gadgil V.J., Geskus D., Aravazhi S., Wörhoff K., Pollnau M., MESA+ institute of nanotechnology, University of Twente, NL
Al2O3 and KY(WO4)2 are promising materials for photonic applications with excellent optical properties and of interest for obtaining on chip resonator structures. However, there is no method available to fabricate these structures except FIB technology. [...]