Gardner J.W. – TechConnect Briefs

CMOS Compatability of Carbon Nanotubes on SOI Devices

Haque M.S., Oei S.P., Teo K.B.K., Udrea F., Gardner J.W., Milne W.I., Cambridge University Engineering Department, UK

This paper reports for the first time PECVD and CVD growth of MWNTs both aligned and non aligned on high temperature partially depleted CMOS SOI substrates. We also report for the first time the growth [...]

3D Thermo-Electro-Mechanical Simulations of Gas Sensors Based on SOI Membranes

Lu C-C., Setiadi D., Udrea F., Milne W.I., Covington J.A., Gardner J.W., Cambridge University, UK

3D thermo-electro-mechanical device simulations are presented of a novel fully CMOS-compatible MOSFET gas sensor operating in a SOI membrane. A comprehensive stress analysis of a Si-SiO2ñbased multilayer membrane has been performed to ensure a high [...]